Integration of a Stacked Contact MOL for Monolithic CFET.

Victor Vega-Gonzalez D. Radisic Bt Chan S. Choudhury S. Wang A. Mingardi Q. Toan Le H. Decoster Y. Oniki P. Puttarame Kevin Vandersmissen J. P. Soulie A. Peter A. Sepulveda D. Batuk G. T. Martinez Olivier Richard Jürgen Bömmels S. Biesemans E. Dentoni Litta Naoto Horiguchi S. Park Zsolt Tokei

Published in: VLSI Technology and Circuits (2023)

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