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Optimizing focused ion beam created solid immersion lenses in bulk silicon using design of experiments.
Philipp Scholz
Christian Gallrapp
Uwe Kerst
Ted R. Lundquist
Christian Boit
Published in:
Microelectron. Reliab. (2010)
Keyphrases
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design process
design parameters
high density
engineering design
real time
high speed
three dimensional
knowledge based systems
virtual environment
user interface
virtual reality
software architecture
design principles
design decisions
computer vision
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