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Non Contact Surface Potential Measurements for Charging Reduction During Manufacturing of Metal-Insulator-Metal Capacitors.
Jan Ackaert
Zhichun Wang
Eddy De Backer
P. Colson
Peter Coppens
Published in:
Microelectron. Reliab. (2001)
Keyphrases
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high temperature
space charge
stainless steel
three dimensional
d objects
grain size
integrated circuit
silicon dioxide
surface temperature
surface fitting
fluidized bed
multiview reconstruction
data sets
manufacturing process
reduction method
free form
neural network