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Fabrication and Performance of a Ta2O5 Thin Film pH Sensor Manufactured Using MEMS Processes.
Yuzhen Guo
Zengxing Zhang
Bin Yao
Jin Chai
Shiqiang Zhang
Jianwei Liu
Zhou Zhao
Chenyang Xue
Published in:
Sensors (2023)
Keyphrases
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thin film
high density
plasma etching
chemical vapor deposition
short circuit
sensor networks
low density
white light interferometry
multi layer
liquid crystal displays
sensor data
solar cell
grain size
data center
electron microscopy
room temperature
databases
integrated circuit
cloud computing
fuzzy logic