Method to assess the impact of LER and spacing variation on BEOL dielectric reliability using 2D-field simulations for <20nm spacing.
Deniz KocaayPhilippe RousselKristof CroesIvan CiofiAlicja LesniewskaIngrid De WolfPublished in: IRPS (2018)
Keyphrases
- dynamic programming
- experimental evaluation
- preprocessing
- computational cost
- high precision
- significant improvement
- similarity measure
- computational complexity
- feature vectors
- image registration
- clustering method
- input data
- theoretical analysis
- fully automatic
- segmentation algorithm
- support vector machine svm
- computationally efficient
- high accuracy
- denoising
- support vector machine
- objective function