Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer.
Nathan NakamuraPaul SzyprytAmber L. DagelBradley K. AlpertDouglas A. BennettWilliam Bertrand DorieseMalcolm DurkinJoseph W. FowlerDylan T. FoxJohnathon D. GardRyan N. GoodnerJames Zachariah HarrisGene C. HiltonEdward S. JimenezBurke L. KernenKurt W. LarsonZachary H. LevineDaniel McArthurKelsey M. MorganGalen C. O'NeilNathan J. OrtizChristine G. PappasCarl D. ReintsemaDaniel R. SchmidtPeter A. SchultzKyle R. ThompsonJoel N. UllomLeila ValeCourtenay T. VaughanChristopher WalkerJoel C. WeberJason W. WheelerDaniel S. SwetzPublished in: Sensors (2024)
Keyphrases
- integrated circuit
- scanning electron microscope
- three dimensional
- atomic force microscopy
- infrared
- focal plane
- data acquisition
- confocal microscopy
- multi sensor
- internal structures
- edge detection
- image sensor
- photon counting
- sensor networks
- imaging systems
- sensor data
- image processing
- medical imaging
- range images
- image capture
- real time
- d objects
- electron beam
- image sequences
- image analysis
- edge information
- x ray
- printed circuit boards
- computed tomography
- high resolution
- machine vision
- fourier transform
- multi view
- time of flight
- depth map
- nuclear magnetic resonance
- multiscale
- limited field of view