Causal modelling of semiconductor fabrication.
Reid G. SimmonsJohn MohammedPublished in: Artif. Intell. Eng. (1989)
Keyphrases
- plasma etching
- causal reasoning
- semiconductor devices
- qualitative models
- high density
- integrated circuit
- causal relationships
- thin film
- causal models
- causal relations
- high speed
- electron beam lithography
- qualitative reasoning
- information retrieval
- electron beam
- semiconductor manufacturing
- causal networks
- causal interactions
- artificial neural networks