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Characteristics of ZnO thin films prepared by radio frequency magnetron sputtering.

Ping-Feng YangHua-Chiang WenSheng-Rui JianYi-Shao LaiSean WuRong-Sheng Chen
Published in: Microelectron. Reliab. (2008)
Keyphrases
  • thin film
  • radio frequency
  • film thickness
  • high density
  • short circuit
  • multi layer
  • frequency band
  • grain size
  • magnetic field
  • plasma etching
  • artificial neural networks
  • room temperature
  • neural network