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Evaluation of via density and low-k Young's modulus influence on mechanical performance of advanced node multi-level Back-End-Of-Line.

Luka KljucarMario GonzalezIngrid De WolfKristof CroesJürgen BömmelsZsolt Tokei
Published in: Microelectron. Reliab. (2016)
Keyphrases
  • back end
  • user friendly
  • data management
  • building blocks
  • data types
  • version control
  • database
  • databases
  • neural network
  • real world
  • metadata
  • data points
  • wavelet transform
  • evaluation method
  • multi layer
  • evaluation criteria