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The measurement of the dielectric and optical properties of nano thin films by THz differential time-domain spectroscopy.
Kwang-Su Lee
Toh-Ming Lu
Xicheng Zhang
Published in:
Microelectron. J. (2003)
Keyphrases
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thin film
electron microscopy
optical properties
chemical vapor deposition
high density
silicon nitride
grain size
multi layer
linear relationship
room temperature
wide field of view
image acquisition
structure from motion
cost effective
medical images
image data
viewpoint
real time