Qualitative Simulation of Semiconductor Fabrication.
John MohammedReid G. SimmonsPublished in: AAAI (1986)
Keyphrases
- qualitative simulation
- plasma etching
- semiconductor devices
- qualitative reasoning
- dynamical systems
- high density
- electron beam
- thin film
- qualitative description
- integrated circuit
- electron beam lithography
- inference process
- genetic regulatory networks
- temporally extended
- field effect transistors
- qualitative models
- causal reasoning
- dynamic systems
- sensitivity analysis
- fixed point