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Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR).

Lilia ArapanGergana AlexievaIvan D. AvramovEkaterina I. RadevaVesseline StrashilovIlia KatardjievVentsislav Yantchev
Published in: Sensors (2011)
Keyphrases
  • thin film
  • high density
  • short circuit
  • electron microscopy
  • solar cell
  • multi layer
  • grain size
  • white light interferometry
  • chemical vapor deposition
  • plasma etching
  • neural network
  • machine learning
  • magnetic field