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Electrical and optical testing system for microplasma in scanning plasma etching.
Weiwei Xiang
Li Wen
Hai Wang
Qiuping Zhang
Jiaru Chu
Published in:
NEMS (2009)
Keyphrases
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plasma etching
physical characteristics
image processing
low density
printed circuit boards
transmission line
thin film
high density
fiber optic
test set
neural network
structured light
real time
image acquisition
test data
power grid
high resolution
three dimensional
case study
optical fiber