Effect of Contacting Surface on the Performance of Thin-Film Force and Pressure Sensors.
Ka-Po Maggie TangKit-lun YickPui-Ling LiJoanne YipKing Hei OrKam-Hong ChauPublished in: Sensors (2020)
Keyphrases
- thin film
- white light interferometry
- film thickness
- high density
- solar cell
- three dimensional
- sensor networks
- grain size
- electron microscopy
- force sensing
- short circuit
- technical support
- surface reconstruction
- tactile sensing
- d objects
- multi layer
- neural network
- chemical vapor deposition
- multi view
- plasma etching
- genetic algorithm