Data Analysis Technique of Atomic Force Microscopy for Atomically Flat Silicon Surfaces.
Masahiro KondaAkinobu TeramotoTomoyuki SuwaRihito KurodaTadahiro OhmiPublished in: IEICE Trans. Electron. (2009)
Keyphrases
- atomic force microscopy
- data analysis
- three dimensional
- data mining
- free form
- high speed
- knowledge discovery
- range data
- data collection
- high density
- big data
- multi aspect
- surface model
- surface reconstruction
- business intelligence
- data processing
- rough sets
- coordinate systems
- curved objects
- digital topology
- surface registration
- real time
- curved surfaces
- machine learning
- cluster analysis
- medical images
- data warehouse
- d objects