thin film capacitors.

Minh Duc Nguyen Ruud Johannes Antonius Steenwelle Paul M. te Riele Jan Matthijn Dekkers Dave H. A. Blank Guus Rijnders

Published in: NEMS (2009)

Keyphrases

thin film
short circuit
high density
solar cell
multi layer
grain size
electron microscopy
room temperature
integrated circuit
chemical vapor deposition
factors influencing
plasma etching
low density
learning algorithm
fuzzy logic
data sources
control system