Integrated Thin Film Silicon Detectors for Fluorescence Sensing.
Aditi DigheNan M. JokerstPublished in: IEEE SENSORS (2018)
Keyphrases
- thin film
- solar cell
- high density
- plasma etching
- chemical vapor deposition
- chance discovery
- silicon nitride
- image analysis
- grain size
- multi layer
- object detection
- short circuit
- low density
- low cost
- electron microscopy
- room temperature
- data analysis
- decision support system
- cost effective
- sensor networks
- control system
- machine learning
- database