RF performance of Standard, High-Resistivity and Trap-Rich Silicon substrates down to cryogenic temperature.
Q. BerlingardM. MoulinJ.-P. MichelT. FacheI. CharletC. PlantierZ. ChalupaJose Lugo-AlvarezJean-Pierre RaskinLouis HutinMikaël CasséPublished in: ESSDERC (2023)