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RF performance of Standard, High-Resistivity and Trap-Rich Silicon substrates down to cryogenic temperature.

Q. BerlingardM. MoulinJ.-P. MichelT. FacheI. CharletC. PlantierZ. ChalupaJose Lugo-AlvarezJean-Pierre RaskinLouis HutinMikaël Cassé
Published in: ESSDERC (2023)
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