Big data analytic for multivariate fault detection and classification in semiconductor manufacturing.
Ying-Jen ChenBocheng WangJei-Zheng WuYi-Chia WuChen-Fu ChienPublished in: CASE (2017)
Keyphrases
- big data
- fault detection
- semiconductor manufacturing
- cloud computing
- fault diagnosis
- data processing
- machine learning
- data management
- big data analytics
- predictive modeling
- industrial processes
- data analysis
- vast amounts of data
- failure detection
- fuel cell
- model selection
- fault identification
- databases
- tennessee eastman
- condition monitoring
- social media
- data mining
- database
- data warehousing
- fault detection and diagnosis
- genetic algorithm
- real world
- robust fault detection