A BIST approach for very deep sub-micron (VDSM) defects.

Yasuo Sato Toyohito Ikeya Michinobu Nakao Takaharu Nagumo

Published in: ITC (2000)

Keyphrases

defect classification
defect detection
deep learning
machine learning
artificial intelligence
image processing
multimedia
case study
multi agent
probability distribution
deep architectures