High-throughput electron beam direct writing of VIA layers by character projection using character sets based on one-dimensional VIA arrays with area-efficient stencil design.
Rimon IkenoTakashi MaruyamaTetsuya IizukaSatoshi KomatsuMakoto IkedaKunihiro AsadaPublished in: ASP-DAC (2013)
Keyphrases
- high throughput
- genome wide
- microarray
- electron beam
- design parameters
- low latency
- biological data
- chinese characters
- dna sequencing
- systems biology
- proteomic data
- mass spectrometry data
- genomic data
- design space
- computer aided
- design process
- dna sequences
- mass spectrometry
- data acquisition
- user interface
- case study
- machine learning