thin films.

Q. Fang I. Liaw Mircea Modreanu Paul K. Hurley I. W. Boyd

Published in: Microelectron. Reliab. (2005)

Keyphrases

thin film
high density
grain size
short circuit
solar cell
multi layer
image data
plasma etching
white light interferometry
database
genetic algorithm
three dimensional
film thickness
chemical vapor deposition