Impacts of Post-Cu CMP Queue Time on Reliability.
Yinghong ZhaoHokyung ParkKi-Don LeeLiangshan ChenManisha SharmaSugento HuandraHanson MaoBrian Filemyr SmithWei XiaJoonah YoonJunehwan KimMyungsoo YeoShin-Young ChungJu Kwang KimPublished in: IRPS (2024)
Keyphrases
- steady state
- queueing theory
- arrival rate
- queuing systems
- priority scheduling
- waiting times
- service times
- queue length
- markov chain
- search engine
- information retrieval
- reliability analysis
- neural network
- retrial queue
- real time
- dynamic programming
- evolutionary algorithm
- case study
- stationary distribution
- failure rate
- error detection
- mechanical properties
- loss probability
- databases
- data sets