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Photo-EMF Sensitivity of Porous Silicon Thin Layer-Crystalline Silicon Heterojunction to Ammonia Adsorption.
Yuriy Vashpanov
Jae-Il Jung
Kae-Dal Kwack
Published in:
Sensors (2011)
Keyphrases
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silicon dioxide
transmission electron microscopy
liquid crystal
low cost
high speed
high density
x ray
plasma etching
semiconductor devices
data sets
neural network
thin film
application layer
space charge
gallium arsenide