Surface Micromachined Out-of-plane Electrostatic MEMS Actuator Integrated with Displacement Sensor.
Seyedfakhreddin NabaviMichaël MénardFrederic NabkiPublished in: IEEE SENSORS (2021)
Keyphrases
- three dimensional
- smooth surfaces
- normal vectors
- gaussian curvature
- grid points
- curved surfaces
- laser scanner
- d objects
- sensor data
- sensor networks
- virtual camera
- multi sensor
- real time
- optical axis
- surface model
- closed loop
- control system
- parametric curves
- fluidized bed
- contact force
- shape index
- uncalibrated cameras
- object surface
- range data