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Micro-/Nanocombined Gas Sensors With Functionalized Mesoporous Thin Film Self-Assembled in Batches Onto Resonant Cantilevers.
Haitao Yu
Pengcheng Xu
Xiaoyuan Xia
Dong-Weon Lee
Xinxin Li
Published in:
IEEE Trans. Ind. Electron. (2012)
Keyphrases
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thin film
genetic algorithm
circuit board
high density
multi layer
data fusion
short circuit
solar cell
sensor networks
sensor data
multi sensor
grain size
data mining
pulse width
plasma etching
room temperature
electron microscopy
neural network
chemical vapor deposition
x ray
high speed
white light interferometry