Light-Assisted Investigation of the Role of Oxygen Flow during IGZO Deposition on Deep Subgap States and their Evolution Under PBTI.
Pietro RinaudoAdrian Vaisman ChasinYing ZhaoBen KaczerNouredine RassoulHarold DekkersMichiel J. van SettenAttilio BelmonteIngrid De WolfGouri Sankar KarJacopo FrancoPublished in: IRPS (2024)