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Elimination of Flammable Gas Effects in Cerium Oxide Semiconductor-Type Resistive Oxygen Sensors for Monitoring Low Oxygen Concentrations.
Toshio Itoh
Noriya Izu
Takafumi Akamatsu
Woosuck Shin
Yusuke Miki
Yasuo Hirose
Published in:
Sensors (2015)
Keyphrases
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high temperature
silicon dioxide
real time
genetic algorithm
monitoring system
sensor networks
high levels
decision support
field effect transistors
sensor data
data acquisition
sensor fusion
metal oxide
plasma etching
gallium arsenide