An efficient volume-removal algorithm for practical three-dimensional lithography simulation with experimental verification.
Edward W. SchecklerNelson N. TamAnton K. PfauAndrew R. NeureutherPublished in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (1993)
Keyphrases
- three dimensional
- experimental evaluation
- detection algorithm
- k means
- learning algorithm
- times faster
- experimental verification
- clustering method
- dynamic programming
- preprocessing
- real world
- cost function
- improved algorithm
- objective function
- optimal solution
- optimization algorithm
- linear programming
- high accuracy
- computationally efficient
- ant colony optimization
- mathematical model
- range images
- probabilistic model
- segmentation algorithm
- particle swarm optimization
- input data
- simulation study
- recognition algorithm
- significant improvement