Edward W. Scheckler

Publication Activity (10 Years)

Years Active: 1992-1994
Publications (10 Years): 0

Publications

Edward W. Scheckler, Andrew R. Neureuther
Models and algorithms for three-dimensional topography simulation with SAMPLE-3D. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 13 (2) (1994)
Kenny K. H. Toh, Andrew R. Neureuther, Edward W. Scheckler
Algorithms for simulation of three-dimensional etching. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 13 (5) (1994)
Edward W. Scheckler, Nelson N. Tam, Anton K. Pfau, Andrew R. Neureuther
An efficient volume-removal algorithm for practical three-dimensional lithography simulation with experimental verification. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 12 (9) (1993)
Edward W. Scheckler, Alexander S. Wong, Robert K. Wang, Goodwin R. Chin, John R. Camagna, Andrew R. Neureuther, Robert W. Dutton
A utility-based integrated system for process simulation. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 11 (7) (1992)