Anton K. Pfau

Publication Activity (10 Years)

Years Active: 1993-1993
Publications (10 Years): 0

Publications

Edward W. Scheckler, Nelson N. Tam, Anton K. Pfau, Andrew R. Neureuther
An efficient volume-removal algorithm for practical three-dimensional lithography simulation with experimental verification. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 12 (9) (1993)