Implementing virtual metrology for in-line quality control in semiconductor manufacturing.
Jason Chao-Hsien PanDamon H. E. TaiPublished in: Int. J. Syst. Sci. (2009)
Keyphrases
- quality control
- semiconductor manufacturing
- process control
- discrete event simulation
- machine vision
- quality assurance
- manufacturing systems
- virtual environment
- automated visual inspection
- manufacturing process
- augmented reality
- control system
- production system
- virtual reality
- line segments
- virtual world
- image processing
- camera calibration
- rate control
- three dimensional
- quality management
- case study
- oil field
- real time