Three-dimensional silicon integration.
John U. KnickerbockerPaul S. AndryBing DangRaymond R. HortonMario J. InterranteChirag S. PatelRobert J. PolastreKatsuyuki SakumaRanjani SirdeshmukhEdmund J. SprogisSri M. Sri-JayanthaAntonio M. StephensAnna W. TopolCornelia K. TsangBucknell C. WebbSteven L. WrightPublished in: IBM J. Res. Dev. (2008)