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Surface Reconstruction From Microscopic Images in Optical Lithography.
Virginia Estellers
Jean-Philippe Thiran
Maria Gabrani
Published in:
IEEE Trans. Image Process. (2014)
Keyphrases
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surface reconstruction
microscopic images
electron beam
range data
range images
point cloud
photometric stereo
surface normals
microscope images
microscopy images
multi view
three dimensional
triangular mesh
x ray