Role of the substrate and the temperature of deposition on the properties of the TaxN thin films.

Miroslav Ocko Sanja Zonja Mile Ivanda

Published in: MIPRO (2012)

Keyphrases

film thickness
thin film
chemical vapor deposition
room temperature
electrical properties
high density
refractive index
plasma etching
solar cell
grain size
database systems
short circuit
white light interferometry
sensor networks