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Fabrication and characterization of lithium-niobate thin film MEMS piezoelectric resonators.
Wei-Siang Tan
Grace W. Fang
Gayathri Pillai
Cheng-Chi Chen
Chao-Yu Chen
Chi-Hang Chin
Sheng-Shian Li
Published in:
NEMS (2016)
Keyphrases
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thin film
high density
plasma etching
short circuit
chemical vapor deposition
multi layer
electron microscopy
solar cell
high voltage
low density
liquid crystal displays
grain size
room temperature
white light interferometry
artificial neural networks
data center
low cost
software engineering