Amorphous Silicon Temperature Sensors Integrated with Thin Film Heaters for Thermal Treatments of Biomolecules.
Nicola LovecchioDomenico CaputoGiulia PetrucciAugusto NascettiMarco NardecchiaFrancesca CostantiniGiampiero de CesarePublished in: Sensors (2016)
Keyphrases
- thin film
- high density
- solar cell
- plasma etching
- room temperature
- chemical vapor deposition
- silicon nitride
- grain size
- short circuit
- electron microscopy
- multi layer
- infrared
- energy saving
- chance discovery
- power plant
- database systems
- white light interferometry
- databases
- lessons learned
- high speed
- wireless sensor networks
- artificial neural networks
- genetic algorithm
- machine learning