Silicon wafer modification by laser interference.

Le Zhao Zuobin Wang Dapeng Wang Ziang Zhang Y. Yu Zhankun Weng Carsten Maple Dayou Li Yong Yue

Published in: NEMS (2013)

Keyphrases

semiconductor manufacturing
low cost
high speed
high density
integrated circuit
fiber optic
semiconductor devices
gallium arsenide
neural network
genetic algorithm
multipath
laser beam
transmission electron microscopy