thin films characterization by X-ray, electrical conductivity and XANES.

C. T. Meneses M. A. Macêdo F. C. Vicentin

Published in: Microelectron. J. (2003)

Keyphrases

x ray
thin film
short circuit
electron microscopy
digital x ray images
x ray images
medical imaging
intraoperative
ct scans
high density
three dimensional
projection images
grain size
metal oxide
plasma etching
guide wire
tomographic images
low frequency
electric field
room temperature
electron microscope