Login / Signup
Permittivity Characterization of Ferroelectric Thin-Film Hafnium Zirconium Oxide Varactors up to 170 GHz.
Sukhrob Abdulazhanov
Quang Huy Le
Dang Khoa Huynh
David Lehninger
Thomas Kämpfe
Gerald Gerlach
Published in:
DRC (2023)
Keyphrases
</>
thin film
electron microscopy
room temperature
silicon nitride
high density
short circuit
grain size
multi layer
solar cell
chemical vapor deposition
plasma etching
white light interferometry
control system
low cost
high speed
film thickness