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Mechanical Vibrations of Thermally Actuated Silicon Membranes.
Ivan Puchades
Mustafa Koz
Lynn Fuller
Published in:
Micromachines (2012)
Keyphrases
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infrared
high speed
low cost
control law
control scheme
high density
information retrieval
active control
microscopy images
open loop
electron microscopy
silicon dioxide
mechanical design
neural network
electrical power
transmission electron microscopy
position tracking
gallium arsenide