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Simulation of microcrack effects in dissolution of positive resist exposed by X-ray lithography.
Roberto Guerrieri
Andrew R. Neureuther
Published in:
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (1988)
Keyphrases
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chest radiographs
x ray
electron beam
electron beam lithography
x ray images
intraoperative
medical imaging
three dimensional
electron microscopy
ct scans
digital x ray images
dual energy
low dose
distortion correction
computed tomography
pre operative
projection images
cone beam
transmission electron microscopy