Low voltage electrowetting on atomic-layer-deposited aluminum oxide.

Jong-hyeon Chang Dae-Young Choi Xueqiu You J. J. Pak S. Han

Published in: NEMS (2010)

Keyphrases

silicon nitride
silicon dioxide
leakage current
low voltage
thin film
gate insulator
high temperature
power line
design considerations
multi layer
electrical properties
space charge
video sequences
power management
cmos technology
image sequences