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Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey.
Guo-Ying Gu
Li-Min Zhu
Chun-Yi Su
Han Ding
Sergej Fatikow
Published in:
IEEE Trans Autom. Sci. Eng. (2016)
Keyphrases
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multistage
data sets
data acquisition
control strategy
control method
control theory
database
social networks
reinforcement learning
optimal control
control law
adaptive control
control problems