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Nanostructured aluminum oxide thin film-based fluorescent sensing: Effects of nanopore size, density and thickness.
Xiangchen Che
Pan Deng
Long Que
Published in:
IEEE SENSORS (2016)
Keyphrases
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thin film
grain size
silicon nitride
electron microscopy
room temperature
film thickness
high density
microscopy images
multi layer
short circuit
solar cell
low density
sensor networks
plasma etching
chemical vapor deposition
field effect transistors
high frequency
wireless sensor networks
white light interferometry