Thermal control system based on thin film heaters and amorphous silicon diodes.
Nicola LovecchioGiulia PetrucciDomenico CaputoSamia AlameddineMatteo CarpentieroLuca MartiniEmanuele ParisiGiampiero de CesareAugusto NascettiPublished in: IWASI (2015)
Keyphrases
- thin film
- room temperature
- control system
- high density
- air conditioning
- solar cell
- energy saving
- plasma etching
- chemical vapor deposition
- power consumption
- data center
- energy consumption
- wireless sensor networks
- low density
- energy efficiency
- silicon nitride
- grain size
- multi layer
- control method
- short circuit
- control algorithm
- closed loop
- real time
- fuzzy logic
- fuzzy control
- electron microscopy
- white light interferometry
- control strategy
- infrared
- pid controller
- fuzzy controller
- film thickness
- low cost
- expert systems
- database