Precise 3D Calibration of Wafer Handling Robot by Visual Detection and Tracking of Elliptic-shape Wafers.
Zining WangMasayoshi TomizukaPublished in: ICRA (2020)
Keyphrases
- inertial sensors
- semiconductor manufacturing
- shape change
- integrated circuit
- facial feature detection
- narrow field of view
- detecting and tracking multiple
- position and orientation
- visual input
- real time
- mobile robot
- vision system
- detection algorithm
- particle filter
- human detection
- object detection
- fourier descriptors
- appearance features
- geometric active contours
- visual tracking
- shape model
- hand eye coordination
- partially occluded
- pan tilt zoom camera
- partial occlusion
- appearance model
- visual information
- camera calibration
- visual feedback
- shape descriptors
- object tracking
- visual features
- humanoid robot
- shape features
- inverse kinematics
- gesture recognition
- video surveillance
- shape analysis
- partial differential equations
- automatic initialization