thin films grown by RF magnetron sputtering.

José Edgar Alfonso Jaime Buitrago Jaime Torres B. Santos J. F. Marco

Published in: Microelectron. J. (2008)

Keyphrases

thin film
film thickness
radio frequency
magnetic field
relevance feedback
high density
grain size
short circuit
room temperature
solar cell
multi layer
chemical vapor deposition
plasma etching
rf sputtering
databases
artificial neural networks