Wafer-Scale Fabrication of V-Shaped Silicon Nano-Slit Arrays.

Qi Chen Yifan Wang Hua Zhang Zewen Liu

Published in: NEMS (2018)

Keyphrases

high density
integrated circuit
high speed
semiconductor devices
plasma etching
range images
semiconductor manufacturing
low density
learning algorithm
data center
low power
massively parallel
electron beam
electrical properties
nano scale
silicon on insulator