Performance improvement of Si-CCD detector based backside reflected light and photon emission microscopy by FIB ultimate substrate thinning.
Arkadiusz GlowackiChristian BoitPhilippe PerduPublished in: Microelectron. Reliab. (2011)
Keyphrases
- photon counting
- charge coupled device
- three dimensional
- multispectral
- high resolution
- integral imaging
- neural network
- image analysis
- significant improvement
- digital camera
- topology preserving
- high speed
- preprocessing
- detection method
- detection algorithm
- high throughput
- endpoints
- medial axis
- electron microscopy
- microscopy images
- negative selection algorithm